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Detailed Program
Paper Number : TF-P03
Time Frame : 12:00~13:30
Presentation Date : Friday, 28, November
Session Name : Thin Films & Layers
Session Chair 1# : -
Session Chair 2# : -
Effects of Seed Layer on the Structural Properties of R.F. Sputtering ZnO Thin Films
Prof. Seunghwan Yi
KNUT(Korea National University of Transportation)
Radio frequency (R.F.) sputtered deposition combined with sol-gel spin coating methods has been applied to achieve a high quality, c-axis oriented ZnO film. The deposited ZnO films show only c-axis oriented ZnO (002) peak. The morphology, structure, and residual stress of deposited ZnO films are found to be strongly dependent on the concentration of the precursor. As the concentration of the precursor is increased from 0.1 M to 0.6 M, the residual stress of the ZnO films changes from compressive (-415 MPa) to mild tensile (+90 MPa) mode. The deposited ZnO film interestingly shows (hexagonal) facets when the concentration of the precursor is 0.6 M. It is suggested that the residual stress manipulation in sputter deposited ZnO film can be controlled by precursor concentration. This technique is believed to be the first time observation, and can be applied for controlling uniformity in micro speaker fabrication.
Acknowledgements : This research was supported by a grant from the Academic Research Program of the Korea National University of Transportation in 2013. The author would like to thank Prof. In and his graduate student for preparing the precursor solutions.