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Detailed Program
Paper Number : TF-P06
Time Frame : 12:00~13:30
Presentation Date : Friday, 28, November
Session Name : Thin Films & Layers
Session Chair 1# : -
Session Chair 2# : -
Composition-dependent Functional Properties of High Quality PZT Films for Micro-scale Electronic Device Applications
Mr. Jusung Kim
KCMC Co.,Ltd.
The wide range of functional properties available in ferroelectric materials, including polarization, pyroelectric, dielectric and piezoelectric responses has received significant attention in current micro-scale electronic device applications. Among ferroelectric family, Pb(Zr,Ti)O3 [PZT] films are considered as most promising candidates for infrared sensors, high-k capacitors, piezoelectric sensors and actuators since they can produce the highest pyroelectric current, dielectric constant and mechanical strain under the stringent control of several key parameters. To develop PZT films and to optimize their properties for these applications, it is necessary to have a comprehensive knowledge regarding the mechanisms and the parameters contributing to the optimized electrical properties. As known from bulk ceramics, the piezoelectric and the dielectric properties vary substantially with composition (Zr to Ti ratio). While the bulk PZT ceramics have been well investigated, there is still a lack of understanding for the film properties, particularly as a function of the film composition and the thickness. To make a reliable property map and to find an appropriate application of PZT films, a systematic investigation on the films with various film composition and thickness is extensively performed using KCMC¢®¯s high quality PZT chemical solution. Here, we describe the relationships between the effects of film composition and thickness on the pyroelectric, the piezoelectric and the dielectric properties, and also introduce a new chemical solution with unique properties for high quality film preparation in detail.
Acknowledgements :