| Home | Log-in | Admin | Sitemap |
Home | Program | Detailed Program
Detailed Program
Paper Number : TF-P07
Time Frame : 12:00~13:30
Presentation Date : Friday, 28, November
Session Name : Thin Films & Layers
Session Chair 1# : -
Session Chair 2# : -
Effect of annealing condition on properties of SnO2/Zn/SnO2 multilayer thin films deposited by RF sputtering
Mr. Sungjae Kim
Changwon National University
Transparent conducting oxides (TCOs) have been extensively studied for a long time due to the variety of their applications; for example, flat-panel displays, light-emitting diodes, touch panels. Recently, some researchers proposed TCO/metal/TCO multilayer structures with much lower resistance as good candidate for electrode devices. Several advantages of TCO/metal/TCO multilayer structures have been reported, which have include low resistance, high optical properties in the visible light range and relatively better chemical stability than single layered metal films.[1-3] In this study, the SnO2/Zn/SnO2 multilayer thin films deposited on quartz substrate have been prepared by RF sputtering method using SnO2 (99.99%) and Zn (99.99%) targets. In order to study the effect of thermal diffusing temperature and time on the structural, electrical and optical performances of SnO2/Zn/SnO2 multilayer films, the deposited films were annealed at different temperatures for different durations. Structural properties of SnO2/Zn/SnO2 thin films were studied by X-ray Diffraction (XRD) patterns. The optical and electrical properties were investigated by UV-Vis spectrometer and Hall effect measurement.
Acknowledgements : This research was financially supported by the Ministry of Education, Science Technology (MEST) and National Research Foundation of Korea(NRF) through the Human Resource Training Project for Regional Innovation (2012H1B8A2026212), This research was supported by the MSIP(Ministry of Science, ICT&Future Planning), Korea, under the ITRC(Information Technology Research Center) support program supervised by the NIPA(National IT Industry Promotion Agency)(NIPA-2014-H0301-14-1016)