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Detailed Program
Paper Number : TF-P08
Time Frame : 12:00~13:30
Presentation Date : Friday, 28, November
Session Name : Thin Films & Layers
Session Chair 1# : -
Session Chair 2# : -
Optimized Process Conditions of Pt Bottom Electrode for High Quality Piezoelectric Films and Multi-functional MEMS Devices
Ms. Sunyoung Lee
KCMC Co.,Ltd.
High quality piezoelectric thin films have been employed in micro-electro-mechanical systems (MEMS) with a broad spectrum of applications, including energy harvesters, micro-actuators, ultrasonic transducers, ink-jet print-heads and piezoelectric sensors etc. Many of these applications require the films to be supported by non-brittle and stable substrates with specific electrodes. Although a number of experimental and theoretical contributions have been made concerning the performance enhancement of piezoelectric films in MEMS devices, no clear consensus has emerged regarding the effects of bottom electrodes on the properties of these films. Generally, the physical and the electrical properties of these films are critically dependent on the quality of the bottom electrode on the substrate. Among many noble metal electrodes, Pt has been extensively used for most piezoelectric films and devices due to its low resistivity, and excellent corrosion and oxidation resistance. The objective of this research is to optimize the process conditions for the preparation of high quality Pt bottom electrodes for reliable MEMS devices since the understanding and the control of the Pt electrode are critically important to obtain the maximized property enhancement of the piezoelectric films and the multi-functional devices. To address these issues, we perform extensive series of experiments with stringent process control parameters such as substrate temperature, pulsed DC power, and bias voltage using our unique DC pulse magnetron sputtering system. Based on our systematic experimental results, we optimize the process parameters for highly textured orientation, excellent adhesion property, dense microstructure, and low resistivity of the Pt electrodes. In parallel, we demonstrate the property improvement of piezoelectric PZT films on our optimized Pt bottom electrodes for successful fabrication of multi-functional MEMS devices. Detailed experimental results and related mechanisms will be discussed.
Acknowledgements :