KJ Ceramics 31

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Detailed Program

Paper Number : TF-P12

Time Frame : 12:00~13"30

Presentation Date : Friday, 28, November

Session Name : Thin Films & Layers

Session Chair 1# : -

Session Chair 2# : -

Thin film multi layer ceramic capacitors (MLCC) using high-dielectric Bi2Mg2/3Nb4/3O7 (BMNO)

Ji-hyun Park

Chungnam National University

Keywords: MLCC, Materials, Structure, Dielectric, Capacitor, Thin film

BMNO dielectric materials with a pyrochlore structure have been chosen and they have quite high dielectric constants about 210 for the bulk material. In the case of thin films, 200-nm-thick BMNO films deposited at room temperature by Radio-Frequency magnetron Sputter (RF Sputter) showed a low leakage current density of about 10-8 A/cm2 at 5 V and a dielectric constant of about 20 at 100 kHz. High dielectric constant BMNO thin films grown at room temperature have many applications for capacitor.
A ceramic capacitor is a fixed value capacitor in which ceramic material acts as the dielectric. It is constructed of two or more alternating layers of ceramic and a metal layer acting as the electrodes.
Ceramic capacitors, especially the multilayer style (MLCC), are the most produced and used capacitors in electronic equipment.
MLCC should be thinner due to its miniaturization, so there is need to thin film dielectric material which have good electrical characteristic.
It is necessary to minimize the thickness of dielectric layer to improve the capacitance, for the purpose of developing the thin film multi layered ceramic capacitor (MLCC). In this work, the relationship between dielectric properties of MLCC and thickness of dielectric such as dielectric thickness is under 200 nm. In addition, properties of annealed MLCC were compared with MLCC manufactured by room temperature. It was found that annealed MLCC showed a low leakage current density. In this work we present the MLCC structure composed BMNO dielectric by RF Sputter. Also when we using MLCC, capacitance of MLCC is superior to capacitor.
It is expected that this report will help MLCC miniaturization.

Acknowledgements :

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