KJ Ceramics 31

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Detailed Program

Paper Number : TF-P13

Time Frame : 12:00~13:30

Presentation Date : Friday, 28, November

Session Name : Thin Films & Layers

Session Chair 1# : -

Session Chair 2# : -

Simultaneous realization of electromagnetic shielding and antibacterial effect of Al doped ZnO multi-layer thin films

Hyung-Jin Choi

Chungnam National University

Keywords: Electromagnetic shielding, Antibacterial effect, Al doped ZnO, Sputtering

With the increasing use of electronic products, their electromagnetic radiation could cause problem, if these high-density electromagnetic waves are not screened effectively. Therefore, electromagnetic interference is becoming a serious global problem. In general, high conductive metal materials are the best shielding materials for reflecting and absorbing electromagnetic waves. However, there is an essential difficulty in satisfying both the electromagnetic shielding performance and the high transparency. Especially, because the touch-panel of the smart device is operated by hand, they are contaminated by the bacteria during use, resulting in the damaged fatal health by these bacteria. Therefore, the simultaneous implementations of the antibacterial properties and electromagnetic wave shield in order to protect us from these hazards were required. In the present study, we intended to achieve both antibacterial properties and electromagnetic shielding using the Al-doped ZnO multi-layer films.
FTS (Facial Target Sputtering) magnetron sputtering was used for the Al doped ZnO thin films instead of the conventional RF sputtering because the FTS sputtering could avoid the damage for the plasma as well as fabrication of thin films with a high quality. The 300-nm thick AZO thin films grown on glass substrate showed a resistivity of about 7 × 10-4 Ω-cm and a transmittance of about 90% at a wavelength of 550 nm. However, the conductivity of the crystallized AZO thin films are deteriorated by absorbing moisture in the air, indicating a long-term stability problem. Therefore, it is intended to ensure long-term stability and an increase of the electrical conductivity by inserting the Ag layer between the AZO thin films. The AZO/Ag/AZO multilayer thin films on glass substrate showed a resistivity of about 7 × 10-5 Ω-cm and a transmittance of about 90% at a wavelength of 550 nm. AZO multi-layer thin films were investigated for the electromagnetic shielding effectiveness measured by 2-port network method at 1.5 ~ 3GHz. An antibacterial effect (Staphylococcus aureus and Escherichia coli) was measured by the film attachment method (JIS Z 2801).

References:
1.Takahiro Yamada, Tetsuya Yamamoto etc, Thin Solid Films. 517, 1027, (2008).
2.Mingjun Hu, Robert Kwok-Yiu Li etc., Langmuir. 28, 7101, (2012)

Acknowledgements :

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