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Detailed Program
Paper Number : EL-I06
Time Frame : 11:35~12:00
Presentation Date : Friday, 28, November
Session Name : Electronic Ceramics
Session Chair 1# : Jong Sook Lee
Session Chair 2# : Nobuyasu Adachi
Preparation of the Sol-gel derived Metal Oxide Electrode
Tomoya OHNO
Kitami Institute of Technology
Keywords: Metal Oxide Electrode, Chemical Solution Deposition, Thin Film

Metal oxide conductors, such as LaNiO3 (LNO), La(Sr,Co)O3 (LSCO) and La(Sr,Mn)O3 (LSMO) have been studied for the electrode of the fuel cell unit and the various electronic devices. In many cases, the thin films of these conductive materials have been deposited on a substrate by chemical vapor deposition (CVD) such as a sputtering technique [1][2]. For the wide application of these conductive oxide thin films, our research group have attempted to prepare these conductive materials by cost effective chemical solution deposition (CSD) with low processing temperatures.
In the case of CSD, the numerous experimental parameters should be optimized to prepare the materials with excellent properties. In this study, we clarified the effect of the processing parameters such as a starting reagents, experimental conditions, and the substrate on the electrical properties of these conductive materials. For example, lanthanum nitrate, metal strontium and cobalt acetate were selected as starting reagents, and 2-methoxy ethanol and 1,3-butanediol were selected as solvents for LSCO precursor solution.
Figure 1 shows the XRD patterns for the CSD derived LSCO electrode on various substrates. In the case of LSCO layer on a LNO with a-axis preferred orientation, the LSCO layer also exhibited a-axis preferred orientation whereas the randomly orientated LSCO layer was obtained on a Si wafer. The electrical conductivity of the resulting LSCO/LNO layers on a Si wafer increased up to 3.6 x 10-2 ¥Øcm-1 depending on the layer thickness.
In addition, we also deposited the piezoelectric materials on the obtained metal oxide electrode, and the electrical properties of the piezoelectric thin film was estimated. As a result, the obtained metal oxide conductive layers were successfully acted as a electrode, and the obtained electrical properties (such as dielectric, ferroelectric and piezoelectric properties) was enhanced compare with that on a conventional metal electrode such as a platinum electrode. Other properties will be exhibited in the presentation.
Acknowledgements :