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Detailed Program
Paper Number : EL-O01
Time Frame : 17:45~17:57
Presentation Date : Thurseday, 27, November
Session Name : Electronic Ceramics
Session Chair 1# : Chae Il Cheon
Session Chair 2# : Hitoshi Ohsato
Fabrication and Characterization of Wrinkle-Free Monolayer
Byeong-Ju Park
Chungnam National University
The graphene films by Chemical Vapor Deposition (CVD) are expected to enable various applications such as graphene Field Effect Transistor (FET) on a wafer scale and transparent conducting films for flexible / stretchable electronics. Although the transfer of the graphene have advantages which make applicable possibility onto various substrates, the CVD-graphene layer control is very difficult when using Cu and Ni film as catalyst and they were transferred on the various substrates, transferred graphene are formed the many wrinkles and / or ripples. The wrinkles and / or ripples cause degradation of the physical and electrical properties of the corresponding electronic devices. In addition, the oxygen atoms that unavoidably contaminate the transferred graphene films may contribute to such degradation.
For fabrication of wrinkle free graphene, we used Ti adhesion layer which is generally used to improve the adhesion between Pt and oxygen-containing or oxygen - philic substrates, such as Si (with native oxide), SiO2 / Si, glass, and polymers. Ti adhesion layer is deposited by DC sputtering with various thickness and graphene were transferred onto the Ti / glass substrates. The Ti adhesion layer reacted to oxygen within transferred graphene and Ti - C - O phases were formed at interface between Ti adhesion layer and graphene, which was resulted in a smoothing of the graphene on the Ti adhesion layer. Also, for wrinkle free monolayer graphene, we used Ti adhesion layer as another substrates. Through the attaching and detaching process, monolayer wrinkle free graphene separated from multilayer wrinkle free and same process, we can fabricate several wrinkle free monolayer using only one wrinkle free multilayer graphene.
For characterization of wrinkle free monolayer graphene, we measured the transmittance, Raman spectroscopy, AFM and bendability. Also, we fabricated capacitor using BMNO dielectrics and monolayer wrinkle free graphene as electrodes and measured capacitance and dielectric loss for transparent and flexible capacitor.

Acknowledgements : This work was supported by a National Research Foundation of Korea (NRF) grant funded by the Korean government (MSIP) (No.NRF-2013R1A4A1069528)