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Detailed Program
Paper Number : EL-O04
Time Frame : 12:00~12:12
Presentation Date : Friday, 28, November
Session Name : Electronic Ceramics
Session Chair 1# : Jong-Sook Lee
Session Chair 2# : Nobuyasu Adachi
Microstructure and Electrical Properties of TiNbO5 and Ti5NbO14 Thin Films grown by Electrophoretic Method
Mir Im
Korea University
Keywords: Titano-niobates, Nano-sheets, MLCC, Electophoresis

TiNbO5 and Ti5NbO14 thin films produced by using KTiNbO5 and K3Ti5NbO14-layered compounds, respectively, have been reported to exhibit a high ¥år with a low leakage current density.[1] Recently, these ultra-thin-films have been actively pursued for the applications in the future multilayer ceramic capacitors. Homogeneous KTiNbO5 and K3Ti5NbO14 phases were formed at 900oC and the dense KTiNbO5 and K3Ti5NbO14 oxides were obtained from the specimen sintered at 1150oC and 1125oC, respectively. Liquid-phase-assisted abnormal grain growth occurred in both specimens along the directions perpendicular to <002> during the sintering. A proton exchange process was carried out to synthesize proton-exchanged forms and the stable [TiNbO5]- and [Ti5NbO14]- nanosheet colloids were formed by reacting intermediate phase powders, tetrabutylammonium hydroxide (TBAOH) solution and DI water. These nanosheet colloids were dispersed into the acetone intermediate, which was used to deposit the thin film by the electrophoresis under 100 V electric source. The TiNbO5 and Ti5NbO14 electrophoretic thin-films have grains along directions perpendicular to <001>. In particular, a high dielectric constant of 48 with a loss of 4.0% at 100 kHz was obtained from the TiNbO5 film annealed at 600oC and this film also showed the low the leakage current density of 2*10-7 A/cm2 at 0.25 MV/cm. However, the Ti5NbO14 films anneled at 700oC showed an ¥år of 41 and a dielectric loss of 1.5 % at 100 kHz with the the leakage current density of 1.5*10-7 A/cm2 at 0.3 MV/cm.

References:

[1] Osada M, Ebina Y, Funakubo H, Yokoyama S, Kiguchi T, Takada K et al. High-k dielectric nanofilms fabricated from titania nanosheets. Adv Mater. 2006;18:1023-1027.
Acknowledgements :