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Detailed Program
Paper Number : GL-O01
Time Frame : 11:10~11:22
Presentation Date : Thurse day, 27, November
Session Name : Glass & Optp-Electonic Materials
Session Chair 1# : Yong Gyu Choi
Session Chair 2# : Atsunobu Masuno
DC voltage application to alkali containing oxide glass
Junji NISHII
Hokkaido University
Two ways are known for the DC voltage application to glass, i.e., contact electrode and non-contact electrode. The former is a conventional blocking electrode method used for the second order harmonic generation [1] and the anodic bonding [2]. The latter is known as a background technology for static electricity removal or dust removal, which is called as corona discharge [3]. This paper reviews our recent studies on the electrical nanoimprint (contact electrode) and corona discharge treatment (non-contact electrode).
1. Electrical nanoimprint
A two dimensional SiO2 grating (700 nm period) coated with carbon was contacted to a soda-lime glass (10 mm ¡¿ 10 mm ¡¿ 1 mm) with glass transition temperature of 555C in a N2 atmosphere at 450C and 0.02 MPa in pressure. A DC voltage of 200 V was applied to the mold for 60 s. The AFM views of mold and imprinted glass surface are shown in Fig. 1. The ToF-SIMS using C60 sputtering revealed the formation of the Na+ deficient regions of 400 nm depth below the mold contacted area. The chemical etching using a 55 wt% KOH solution (70C) remove the Na+ deficient regions selectively (see (c)), because its chemical durability is much lower than that of the non-contacted area. The fine pattern was formed in the whole plate with a convex surface having 80 nm vertical interval, which is much larger than the imprinted structure height. An electrostatic attractive force might cause the perfect contact between mold and glass.
2. Corona discharge
The corona discharge is generated by a high DC voltage application between an anode electrode and a cathode electrode. A soda-lime glass plate coated with a UV curable resin pattern placed on the cathode stage heated at 100C in air. The protons generated in the corona migrated and penetrated into the glass surface. The resin-patterned area protected the injection of proton. The Na+ equivalent with the injected proton discharged at the anode side. The Na+ deficient area was removed by the KOH etching. Fig. 2 shows the surface views of the resin pattern and the glass surface after the corona discharge treatment for 24 h followed by the KOH etching for 24 h. This process is appropriate for the large area patterning under atmospheric pressure and low temperature.


References:
1. R.A. Myers et al., Opt. Lett., 16(1991)732-734.
2. M. Esashi et al., Sensors and Actuators, A21-A23(1990)931-934.
3. M. Pavlik at al., Rapid Commun. Mass Spectrom., 11 (1997)1757-1766.
Acknowledgements : The author thanks profs. D. Sakai, K. Harada of Kitami Int. Tech., H. Ikeda of Kyushu Univ., Dr. K. Yamamoto, Mr. T. Suzuki, Mr. K. Uraji of AGC Co.Ltd., Mr. Nishiura of Maruzen Petrochemical Co., Ltd. for their collaborations