| Home | Log-in | Admin | Sitemap |
Home | Program | Detailed Program
Detailed Program
Paper Number : LP-I03
Time Frame : 16:55~17:20
Presentation Date : Thurseday, 27, November
Session Name : Leadfree Piezoelectrics
Session Chair 1# : Jae-Shin Lee
Session Chair 2# : Satoshi Wada
Fabrication and characterization of epitaxial KNN films
Feng Chen
Chinese Academy of Science
(K,Na)NbO3 was supposed to be one of the most promising substitutes for toxic Pb-based ferroelectrics because of the comparable properties to PZT system.[1] Therefore; tremendous efforts have been devoted to the environment-friendly KNN-based material during the past decade. Modern devices require function materials with low dimension. In this presentation, we report on epitaxial (1-x)(Na0.49K0.49Li0.02)(Nb0.8Ta0.2)O3-xCaZrO3 [KNN] films grown by pulsed laser deposition on SrTiO3 substrate. The effects of deposition parameters and electrode configurations on their ferroelectric properties were systematically studied. High resolution XRD, Raman scattering and XPS were carried out to characterize the quality of the films. The film made with optimized parameters shows high crystallinity with FWHM at ~ 0.1o and exhibits large remnant and saturated polarization of 13.2 and 27.9 ¥ìC/cm2. Moreover, it is found that KNN epitaxial films show a high fatigue resistance even with Pt metallic electrode, which is dramatically different from PZT films,[2] indicating a higher capability of integration in modern micro-electromechanical systems (MEMS). The XPS results show that KNN/Pt interface is much stable, comparing to PZT/Pt interface, which might be closely related to the fatigue behavior.
Acknowledgements :