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Detailed Program
Paper Number : PI-I04
Time Frame : 13:50~14:10
Presentation Date : Thurseday, 27, November
Session Name : Piezoelectric Materials, Devices & Applocations
Session Chair 1# : Miso Kim
Session Chair 2# : Takeshi Morita
Piezoelectric thin films and their MEMS applications
Isaku Kanno
Kobe University
Micro-electromechanical systems (MEMS) technologies have attracted considerable attention for the development of next-generation functional microdevices. In general MEMS devices, functionality is originated from three-dimensional micro-structures which can be fabricated by Si microfabrication technologies. Recently, functional materials such as piezoelectric materials have gradually been integrated into MEMS to give new functionality in simple micro-structures. For the integration of piezoelectric materials into MEMS, the piezoelectric materials should be prepared in thin-film form. The most popular piezoelectric materials are Pb(Zr,Ti)O3 (PZT) because of its excellent energy conversion efficiency between mechanical and electric domains. The deposition and characterization of PZT thin films have been intensively studied, and recently, some of piezoelectric MEMS composed of PZT films have been developed as commercial products. Fig. 1 shows the images of typical piezoelectric MEMS devices. In addition to these applications, piezoelectric MEMS energy harvesting is one of the promising technologies in the future piezoMEMS.
The technical issues in the development of piezoelectric MEMS devices are
1) Deposition process of high quality piezoelectric thin films
2) Prices measurement of transverse piezoelectric properties of thin films
3) Development of lead-free piezoelectric thin films
In this talk, I will present the deposition process of PZT thin films, especially re-magnetron sputtering from the viewpoint of MEMS applications. In addition, the recent progress of the lead-free piezoelectric thin films is introduced. Among a variety of piezoelectric MEMS, we pick up the piezoelectric MEMS energy harvesters, and the basic characteristics and applications of piezoelectric MEMS energy harvesters will be presented.
Acknowledgements :