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Detailed Program
Paper Number : PI-O04
Time Frame : 14:10~14:22
Presentation Date : Thurseday, 27, November
Session Name : Piezoelectric Materials, Devices & Applications
Session Chair 1# : Miso Kim
Session Chair 2# : Takeshi Morita
High Temperature Nano-grained PbTiO3 Thick Film by Aerosol-Deposition
Jungho RYU
Korea Institute of Materials Science (KIMS)
In this research, thick polycrystalline PbTiO3 films on Platinized Si wafer with nano size grains (several tens to 200 nm) and high density were successfully deposited by aerosol deposition. Annealed at 700 ¡ÆC seven micron thick films exhibit well-saturated ferroelectric hysteresis loops with a remanent polarization and coercive field of 35 ¥ìC/cm2 and 94 kV/cm, respectively. A large-signal effective d33,eff value of > 60 pm/V is achieved at room temperature. The measured ferroelectric transition temperature (Tc) of the films ~ 550¡ÆC is >50¡ÆC higher than the reported values (~490¡ÆC) for PbTiO3 ceramics. First principles calculations combined with electron energy loss spectroscopy (EELS) and structural analysis indicate that the film is composed of nano size grains with slightly decreased tetragonality. There is no severe off-stoichiometry, but a high compressive in-plane residual stress was observed in the film along with a high transition temperature and piezoelectric response. The ferroelectric characteristics were sustained above 250¡ÆC providing significant advancement towards realizing high temperature piezoelectric materials.

Figure 1 SEM micrograph and electrical properties of PbTiO3 thick film

References:

[1] J. Ryu et al, ACS Applied Materials and Interface, 6, 11980-11987 (2014)
Acknowledgements : This research was supported by the Basic Science Research Program through the National Research Foundation of Korea (NRF-2012R1A1A2A10041947) and the Global Frontier R&D Program (2013-073298) on Center for Hybrid Interface Materials (HIM) funded by the Ministry of Science, ICT & Future Planning.